Fabrication Techniques for MEMs-based sensors : clinical perspective

Week 1  :  Introduction to microengineering devices and its applications

Week 2  :   Clean room, contaminants, wafer cleaning processes (DI water, RCA, metallic impurities, etc.).

Week 3  : Introduction to the microheater, force sensors, microfluidic devices, its specifications, and applications.

Week 4  :  Masks: Types of masks, Types of Photoresists, Spin Coaters Lithography process: optical lithography, x-ray, and e-beam lithography, lift-off techniques, soft lithography, Use of resists (spin coating, positive and negative photoresists), photoresist pre-baking, exposure, and development.

Week 5  :  Etching: Isotropic/anisotropic, selectivity, wet and plasma assisted etching.

Week 6 :  Types of wafers and orientations. Techniques of metallization: PVD [(Sputtering – DC, RF, and Magnetron), thermal evaporation, e-beam evaporation].

Week 7 :  Chemical Vapor Deposition: Dielectric films (Plasma Enhance Chemical Vapor Deposition (PECVD)), Atomic Layer Deposition

Week 8  :  Understanding and designing the process flow for fabricating microengineering devices. Process flow for microheater, force sensors, and microfluidic devices.

Week 9  :  Wafer dicing and bonding techniques. Microfluidic Chips

Week 10  :  Process Flow for Fabricating Flexible Force Sensors and Force Sensors on Silicon, Process Flow for Fabricating VOC sensors, Biochips

Week 11  :  Clinical Research: Problems and Solutions using Microengineering Device

Week 12  :  Visit to non-conventional Class 10000 Clean Room and discussing few equipment within

1.J.D. Plummer, M.D. Deal, P.G. Griffin, Silicon VLSI Technology, Pearson Education, 2001. S.A. Campbell,

2.The Science and Engineering of Microelectronic Fabrication, Oxford University Press, 2001. S.M. Sze (Ed), VLSI Technology, 2nd Edition, McGraw Hill, 1988 Senturia

3.S. D., Microsystem Design, Kluwer Academic Publisher, 2001 Madou, M Fundamentals of Microfabrication, CRC Press, 1997. Gad-el-Hak, M., Ed.;

4.The MEMS Handbook; CRC Press: New York, NY, 2002.