Fundamentals of electronic device fabrication

By Prof. Parasuraman Swaminathan | IIT Madras

Learners enrolled: 1575

The course is intended to provide an understanding of current fabrication practices used in the semiconductor industry, along with the challenges and opportunities in device fabrication. It caters to UG and PG students from diverse backgrounds such as Chemical, Electrical, Mechanical, Metallurgy, Materials Science, Physics, and Chemistry. The course provides an overview on the integrated circuit fabrication along with practices and challenges to continue to satisfy Moore’s law.

INTENDED AUDIENCE: Engineering and Science students at the UG and PG level

INDUSTRY SUPPORT: Semiconductor device fabrications companies such as TSMC and Applied Materials will value this course

Summary

Course Status :	Completed
Course Type :	Elective
Language for course content :	English
Duration :	4 weeks
Category :	Metallurgy and Material science & Mining Engineering
Credit Points :	1
Level :	Undergraduate
Start Date :	29 Jul 2019
End Date :	23 Aug 2019
Exam Date :	29 Sep 2019 IST

Note: This exam date is subject to change based on seat availability. You can check final exam date on your hall ticket.

Page Visits

Course layout

This is a four week course, which deals with the various steps involved in integrated circuit fabrication, starting with silica, which is the raw material for making silicon wafers. The course contents are divided into four weeks as per the plan below.

Week 1: Introduction and overview of semiconductor device fabrication

Week 2: Fabrication operations: Oxidation, doping, and lithography

Week 3: Fabrication processes: etching and growth. Process evaluation

Week 4: Process yield, clean room design, and IC logic and packaging

Lectures videos are available for each week and there will be an assignment at the end of the week. Along with this, optional additional reading material will also be available. Some of the alternate fabrication techniques, especially printed electronics, will be included in this reading material.

Books and references

There is one textbook for this course. This is a book that I published two years ago and covers the topics associated with semiconductor materials, devices, and fabrication.

1.Semiconductor Materials, Devices and Fabrication, Parasuraman Swaminathan, Wiley India, 2017. Amazon link. Flipkart link.

Reference

2.Microchip Fabrication: A Practical Guide to Semiconductor Processing, 6th Edition, Peter Van Zant, McGraw-Hill, 2013. Amazon link.

Instructor bio

Course Instructor

Prof. Parasuraman Swaminathan is an Associate Professor in the Dept. of Metallurgical and Materials Engineering at IIT Madras. He graduated from IITM, with a B. Tech and M. Tech Dual degree and completed his PhD from the University of Illinois. He obtained a Postdoctoral fellowship from Johns Hopkins University, and worked at Intel Corp as a Yield Engineer, before joining IITM in 2013. He has one online course on the NPTEL platform and has published a textbook (Wiley) on semiconductor materials. His research interests include printed electronics and thin film deposition. He was awarded the Young Faculty Recognition Award in 2018, by IITM, for excellence in teaching and research.

His group website can be accessed at https://mme.iitm.ac.in/swamnthn/

Course Teaching Assistant

Nitheesh M. Nair is an interdisciplinary research scholar in the departments of Metallurgical and Materials Engineering and Electrical Engineering, IIT Madras. He received the B. Tech degree in Electronics and Communication Engineering and M. Tech degree in VLSI and Embedded Systems Engineering. He has done courses on Electronic Materials, Devices and Fabrication, Semiconductor Device Modelling and Solar cell Device Physics and Materials Technology. The broad area of his research is the field of printed electronic devices with emphasis on printed antennas and transparent conducting electrodes.

Course certificate

The course is free to enroll and learn from. But if you want a certificate, you have to register and write the proctored exam conducted by us in person at any of the designated exam centres.
The exam is optional for a fee of Rs 1000/- (Rupees one thousand only).
Date and Time of Exams: 29 September 2019, Morning session 9am to 12 noon; Afternoon Session 2pm to 5pm.
Registration url: Announcements will be made when the registration form is open for registrations.
The online registration form has to be filled and the certification exam fee needs to be paid. More details will be made available when the exam registration form is published. If there are any changes, it will be mentioned then.
Please check the form for more details on the cities where the exams will be held, the conditions you agree to when you fill the form etc.

CRITERIA TO GET A CERTIFICATE

Average assignment score = 25% of average of best 3 assignments out of the total 4 assignments given in the course.
Exam score = 75% of the proctored certification exam score out of 100
Final score = Average assignment score + Exam score

YOU WILL BE ELIGIBLE FOR A CERTIFICATE ONLY IF AVERAGE ASSIGNMENT SCORE >=10/25 AND EXAM SCORE >= 30/75.

If one of the 2 criteria is not met, you will not get the certificate even if the Final score >= 40/100.
Certificate will have your name, photograph and the score in the final exam with the breakup.It will have the logos of NPTEL and IIT Madras. It will be e-verifiable at nptel.ac.in/noc.
Only the e-certificate will be made available. Hard copies are being discontinued from July 2019 semester and will not be dispatched

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